Requirements for a transportation system based on ultrasonic traveling waves using the measurement of spatial phase difference

Having good control over the speed and direction of non-contact transportation is critical in industry today, especially areas such as manufacturing flat panel displays, silicon wafers semi-silicon a number other electronic devices. In dual transducer-type ultrasonic levitation-based system, it well known that vibrating plate length wavelength flexural vibration should satisfy strict relationship, i.e. one given by spatial phase difference, ?, so process could be fast possible therefore most effective for industry. However, difficult to obtain value ? through calculation, or making adjustments during operation process. this paper, relationship across temporal shift, ?, Standing Wave Ratio (SWR), which directly controls was derived authors first time. Subsequently, experimental solutions measurement were obtained work, using Laser Doppler Vibrometer-based approach (LDV) result, research has been successful giving results series experiments carried out reported.